FAB

VTT Aluminum Junction Process

Description

This process allows for fabrication of coplanar structures on a high-resistivity silicon substrate, like resonators with quality factors of about one million. Aluminum junctions (Manhattan style) fabricated via electron-beam lithography can be used to make transmon qubits.

CMC offers this process as part of a multi-project wafer (MPW) service.

Al-AlOx-Al junctions with normal-state resistance ranging from 4k to 15 kOhm
High-resistivity silicon substrate
Nb wiring layer

Applications

Josephson junctions
SQUIDs
Resonators
Qubits
Low-temperature electronics

Services

Design kits
Design-rule checking services
CMC engineering support

Features

Nb resonators with Q-factor of approximately one million
Aluminum junctions

Pricing

List Price

Price for Subscribers

$30,000
(per 5 x 5 mm² design)

Click for Subscriber Pricing

Note: List pricing is in US funds and does not include engineering support. Contact fab@cmc.ca for a quote.

Notes:

Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.
VIE clients are eligible to receive a discount. Contact sales@cmc.ca for assistance.
Larger or smaller chip sizes can be accommodated in the run by sending a special request to fab@cmc.ca.

Licensing

Contact licensing@cmc.ca.

Minimum Access Requirement

For Canadian Academics

To Apply

FAB Support

Does your research benefit from products and services provided by CMC Microsystems?

FAB