FAB

FABrIC Logo white

Teledyne DALSA MIDIS Platform

Description

The MEMS Integrated Design for Inertial Sensors (MIDIS™) platform is designed to provide a standard process for manufacturing accelerometers and gyroscopes and integrating them into an Inertial Measurement Unit (IMU) for application areas such as consumer (mobile), automotive, aerospace and sports/health markets.

The MIDIS™ Platform is being offered as Multi-Project-Wafer (MPW) service through CMC Microsystems and is available for both academic and industrial R&D. Together CMC and Teledyne DALSA offer a seamless path from MPW design confirmation to volume manufacturing.

Note: The expected number of chips to be delivered for this technology is 40.

Applications

  • Accelerometers
  • Gyroscopes
  • Resonators
  • Inertial sensor combos (Sensor fusion)

Sevices

  • CAD tools
  • Design kits (Cadence, Coventorware, Tanner/MEMSPro L-Edit)
  • Access to CMC support engineers
  • Design rule checking services
  • Documentation including design handbooks, application notes and design methodologies
  • Packaging & assembly services

Features

  • Getter-free high-vacuum sealing allows resonator Q factors > 20,000
  • Efficient wafer-level packaging minimizes overall die size
  • 1.5-μm feature size in a 30-μm thick membrane
  • Comb height control allows out-of-plane sensing
  • TSV allows compact design ready for co-packaging
  • Deliver 40 copies for each design
  • Sealed-cavity MEMS
  • 30-μm structure layer
  • High-vacuum

Design Kits and Libraries

Pricing

List Price
Price for Subscribers

Note: List pricing is in US funds and does not include engineering support. Contact fab@cmc.ca for a quote.

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.

Licensing

Minimum Access Requirement

For Canadian Academics

Does your research benefit from products and services provided by CMC Microsystems?

The CMC SponsorChip program helps companies enhance their research efforts and links to academic researchers.

Scroll to Top
Skip to content