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Semiprobe LA-150 Probe Station

The Semiprobe LA-150 Probe Station includes a large platen suitable for 6” or 150mm wafers or smaller fragments and packages for test. The system includes 100x zoom stereo optics and the fine movement in X&Y is 25mm while in Z it is 20mm. Theta movement is 360 degrees with fine theta in the 10 degree range. This station was originally purchased for use as part of a 90GHz VNA test solution and as such, comes with probe holders compatible with the 60-90GHz VDI Mini VNAX frequency extension modules. This Probe station has been tested with the Keysight N5292A test controller, VDI Mini VNAX frequency extension modules, and Keysight N5247B 67GHz VNA.

Applications

  • RF-test station for 5G, automotive radar

Specifications

  • Stereo Zoom Microscope 100x magnification, 100mmx100mm movement
  • Handles 6” or 150mm wafers down to fragments and packages
  • Fine X,Y movement is 25mm
  • Fine Z movement is 20mm
  • Chuck theta is 360 rotation, fine theta ~10 degrees

Notes

  • This instrument does not come with a planarization substrate and GSG probes.
  • The instrument is packaged in two Pelican Cases.

What’s Included

  • Semiprobe Lab Assistant LA-150 HF probing system
  • MA-8500 Semiprobe manipulator with X, Y, Z, and roll controls
  • Probe Holders for 60-90GHz VDI Mini VNAX frequency extension modules
  • Motic SMZ 168 trinocular head stereo zoom microscope
  • Mobile Phone Adapter to microscope
  • CCTV System with colour camera, 24” monitor, cabling
  • CS-5 Calibration Substrate by GGB
  • Vacuum Pump

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James Millar
Technical Staff, Embedded Systems Design
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