Specifications
Probe Station
- 2” Stainless Steel Vacuum Chuck
- Vacuum rings for wafer and single die
- Chuck Stage Travel: 2” in X & Y with 10 µm positioning resolution
- Chuck Theta: ±15 degrees
- Dimensions: Width, Length, Height: 320 mm (12.6”)
- Weight: 15 kg total, with microscope and positioners
Positioners
- EB-050E positioner
- X-Y knobs in line with Linear 12 mm Travel in X, Y & Z
- Stainless Steel Lead Screw with 80 Thread/Inch for 1 µm positioning resolution
- Lever-actuated magnetic base for quick-release locking to platen
- Coaxial tip holder with 1.5 m cable with BNC male connector
Microscope
- Dino-Lite
- 200x magnification
Applications
- Specifically designed for portable probing applications and can be located in a glove box, environmental chamber and shielded chamber
- DC I-V semiconductor characterization: on-wafer diodes, transistors; printed electronics; 4-point probe resistivity measurements
What’s Included
- EVERBEING Model C-2 Probe Station
- Dino-Lite Edge USB microscope and software
- 4x EB-050E Micropositioners with Coaxial Tip Holder
- Two cases Tungsten Tip T20-50
- Low Noise Vacuum Pump