VTT Niobium SWAPS Junction Process
This two-layer process allows for the fabrication of Niobium side-wall passivated junctions via an Nb-Al-AlOx-Nb tri-layer, alongside an Nb wiring layer on top. CMC offers this process as part of a multi-project wafer (MPW) service. Nb-Al-ALOx-Nb trilayer junctions High-resistivity silicon substrate Nb wiring layer on top The process provides 20 copies of the designs. Applications […]
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