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MEMSCAP PiezoMUMPs Process Technology

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Description

PiezoMUMPs is a piezoelectric-based MEMS process for ME, ECE and biomedical researchers to develop sensors, energy harvesters, ultrasonic transducers, microphones, and self-contained microsystems for automotive, aerospace, healthcare and entertainment electronics markets.

Note: The expected number of chips to be delivered for this technology is 15.

Features

  • SOI MEMS
  • 10 μm structure layer
  • piezoelectric metal

Design Kits and Libraries

Pricing

List Price
Price for Subscribers

$1,955
(per 4.75 mm x 4.75 mm design)


$7,822
(per 10 mm x 10 mm design)

Note: List pricing is in US funds and does not include engineering support. Contact fab@cmc.ca for a quote.

Note: Discounted pricing is available to academics in Canada with a CMC Subscription. You must sign in to see it.

Licensing

Minimum Access Requirement

For Canadian Academics

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